Type and energy of particles: protons or deuterons from 1 to 4MeV or Alphas from 2 to 6MeV for Alphas. Beam size: down to 20µm. Single spot or mapping on areas up to cm²-sized area (max 20x20cm²). IBIL system: optical spectrometer (200-1000 nm). Resolution : 3 nm FWHM (100 µm entrance slit).
IBIL allows to detect ultra traces elements not detected by PIXE or to differentiate between several mineral phases with the same composition.